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The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Virtual Tour of CNS
CNS provides state-of-the-art equipment and training to enable its users to answer complex scientific questions in the areas of fabrication, imaging, and characterization of nanoscale structures.
Video Overview of CNS
CNS
The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
CNS Facilities
Two sites. Three exceptional research resources.

Cambridge:
Nanofabrication
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Cambridge:
Imaging and Analysis
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Allston:
Imaging and Analysis
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Events

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  • Introduction to Dry Etch

    Nov 10 11:00 AM - 12:00 PM

    Ling Xie

    Online with Zoom: ID 990 9681 5765, passcode 315648.

  • RIE 11 PlasmaTherm Diamond Etcher

    Nov 11 1:00 PM - 2:00 PM

    Ling Xie

    CNS Cleanroom at RIE 11

  • CNS orientation G07 LISE access

    Nov 12 9:00 AM - 10:30 AM

    John Tsakirgis

    G07

  • Electrical Property Measurement of Devices and Thin films Inside Nanofabrication Cleanroom

    Nov 13 11:00 AM - 12:00 PM

    Jason Tresback

    Inside Nanofabrication Cleanroom LISE-G07 (cleanroom-metrology bay)

  • AB-2 RAC Clean Wet Process Station

    Nov 17 1:00 PM - 2:00 PM

    Bok Yeop Ahn

    Acid bench in the cleanroom

News

29 Jun, 2026

CNS Nanofabrication Summer School 2026

CNS Nanofabrication team will provide a series of tutorials on nanofabrication technologies. Two classes every week will not only cover the fundamentals of nanofabrication technology, but also the process tips/tricks, and related frontier research and applications. All CNS users are eligible to attend. The certificate will be awarded to any attendee who takes 8 or more courses!

Location: 100 Geo Lecture Hall, 24 Oxford St., Cambridge MA, 02138,
Time : Tuesday/Friday, 12:00-1:30pm,
Pizza lunch will be provided. The agenda may be changed according to the availability of staff and vendors.
Contact Ling Xie: lxie@cns.fas.harvard.edu; JD Deng: jdeng@cns.fas.harvard.edu


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17 Feb, 2026

2026 CNS Spring Seminar Series

LISE 303, 1-2pm

Feb 20th: Prof. Donhee Ham, Harvard University

Feb 27th: Tony Song, Loncar Group, Harvard University

Mar 6th: David Kirkwood, Axelis

Mar 13th: Jonathan Zuberman, Kim Group, Harvard University

Mar 27th: Patrick Forrester, Yacoby Group, Harvard University

Apr 3rd: Ted Letsou, Capasso Group, Harvard University

Apr 10th: Erick Ramosmurillo, Alkemie

Apr 24th: Guanhao Huang, Loncar Group, Harvard University

May 1st: Jae Hyeong Lee, 3D-Architech

May 8th: Jason Yu, Hekstra Group, Harvard University

May 15th: Aaron Day, Loncar & Munday Groups, Harvard University

Contacts: Ling Xie lxie@cns.fas.Harvard.edu, William Wilson wwilson@cns.fas.Harvard.edu

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Recent Publications

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  • A silicon chip for water-based parallel DNA synthesis

    Woo-Bin Jung and Donhee Ham

    Nature Electronics (2026). DOI: 10.1038/s41928-026-01664-7

  • Parallel enzymatic DNA synthesis using a semiconductor chip

    Woo-Bin Jung, Han Sae Jung, Jun Wang, Henry Hinton, Seok Joo Kim, Yuchang Zhang, Suyue Chen, Young-ha Hwang, Maxime Fournier, Manon Boul, Kevin Grosselin, Adrian Horgan, Xavier Godron, Robert Nicol and Donhee Ham

    Nature Electronics (2026). DOI: 10.1038/s41928-026-01662-9

  • Streamlined fabrication process of Si nanopillars for metasurface applications

    Kareena Guness, T. Pan Menasuta, Zachary Kranefeld, Basil Vanderbie, Thomas E. Vandervelde

    J. Vac. Sci. Technol. B 1 January 2026; 44 (1): 012802. https://doi.org/10.1116/6.0005157

  • Bi surfactant-driven surface smoothing in InSb(100) epitaxy across extended growth temperatures

    T. Pan Menasuta, John H. McElearney, Thomas E. Vandervelde

    J. Vac. Sci. Technol. A 1 July 2026; 44 (4): 042705. https://doi.org/10.1116/6.0005473

  • Isotropic shrinkage of patterned vacancies enables three-dimensional nanoprecise metastructures for visible light applications

    Quansan Yang, Gaojie Yang, Takahiro Nambara, Hiroyuki Kusaka, Yuichiro Kunai, Alex C. Matlock, Corban Swain, Brett Pryor, Yannick Salamin, Daniel Oran, Hasindu Kariyawasam, Ramith Hettiarachchi, Dushan Wadduwage, Marin Soljačić, Peter T. C. So & Edward S. Boyden

    Nature Photonics https://doi.org/10.1038/s41566-026-01896-1

  • Topochemical oxidation of Ruddlesden–Popper nickelates reveals new structural family: oxygen-intercalated layered perovskites.

    12. Dan Ferenc Segedin, Jinkwon Kim, Harrison LaBollita, Nicole K. Taylor, Kyeong-Yoon Baek, Suk Hyun Sung, Ari B. Turkiewicz, Grace A. Pan, Abigail Y. Jiang, Maria Bambrick-Santoyo, Tobias Schwaigert, Casey K. Kim, Anirudh Tenneti, Alexander J. Grutter, Shin Muramoto, Alpha T. N’Diaye, Ismail El Baggari, Donald A. Walko, Hua Zhou, Charles M. Brooks, Antia S. Botana, Darrell G. Schlom, Julia A. Mundy.

    J. Am. Chem. Soc. 2026, 148, 6, 5873–5880.

  • Power Handling Modeling of Micro-and Nanoacoustic Resonators

    L Spagnuolo, F Perli, A Corigliano, L Colombo, M Rinaldi

    0

  • High-Performance Solidly Mounted Bidimensional Mode Resonators (S2MRs) Operating Around 16 GHz

    Luca Spagnuolo, Luca Colombo, Kapil Saha, Gabriel Giribaldi, USA Pietro Simeoni, Matteo Rinaldi

    0

  • 18 GHz Filters based on Cross-Sectional Lamé Mode Resonators (CLMRs)

    L Spagnuolo, K Saha, P Simeoni, L Colombo, M Rinaldi

    1

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WILLIAM WILSON
EXECUTIVE DIRECTOR

Directors Welcome

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research a

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ROBERT WESTERVELT
DIRECTOR

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